Cluster_ALD_PECVD_ICP-CVD (IAF-05.1/05.2/05.3/05.4/05.5) - PR1036076-2050-P
1 piece Cluster_ALD_PECVD_ICP-CVD Fraunhofer IAF plans to purchase a cluster system with ALD, PECVD and ICP-CVD deposition chambers. The system should be suitable for processing 150 mm wafers.
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1 piece Cluster_ALD_PECVD_ICP-CVD Fraunhofer IAF plans to purchase a cluster system with ALD, PECVD and ICP-CVD deposition chambers. The system should be suitable for processing 150 mm wafers.
- Ausschreibungstyp: Ausschreibung
- Auftraggeber: Fraunhofer-Gesellschaft - Einkauf B12
- Veröffentlicht: 20. April 2026
- Frist: Nicht angegeben
Ausschreibungsbeschreibung
1 piece Cluster_ALD_PECVD_ICP-CVD Fraunhofer IAF plans to purchase a cluster system with ALD, PECVD and ICP-CVD deposition chambers. The system should be suitable for processing 150 mm wafers.
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